Role of precursors in the formation of lead zirconate titanate thin films
作者： N. M. Kotova , K. A. Vorotilov , D. S. Seregin , A. S. Sigov
DOI: 10.1134/S0020168514060107
关键词: Alkoxide 、 Inorganic chemistry 、 Materials science 、 Lead acetate 、 Zirconium 、 Silicon 、 Titanium isopropoxide 、 Thin film 、 Lead zirconate titanate 、 Ferroelectricity
摘要: Thin ferroelectric Pb(Zr0.48Ti0.52)O3 lead zirconate titanate films have been prepared on platinized silicon substrates via chemical solution deposition. The starting film-forming solutions were by reacting acetate with Ti and Zr alkoxides in 2-methoxyethanol. electrical properties of the shown to depend alkoxide precursors used synthesis. nature zirconium had strongest effect films. best obtained n-propoxide.
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