Study of Magnetic Fields of Magnetron Sputtering Affecting CrN Films
作者： San Jen Lee , Ming Der Jean , Maw Tyan Sheen , Ching Fu Wu , Feng Ming Chen
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMM.401-403.822
关键词: Composite material 、 Sputtering 、 Metallurgy 、 Microstructure 、 Tribology 、 Chromium nitride 、 Sputter deposition 、 Magnet 、 Intensity (heat transfer) 、 Magnetic field 、 Materials science
摘要: This article presents the distribution of varying magnetic field and its effect by magnetron sputtering on mechanical properties CrN films. The variations in processes were explored, strength unbalanced systems is controlled. In addition, microstructure, composition surface films prepared investigated. At a GDMT 27mm, highest wear rate value hardness values seems to be appeared, while higher critical force appears occur at 49mm during 18 tests. experimental results have showed that enhancement overall intensity gap distance 27mm between magnet set target (GDMT), varied having significant influence structures was readily noticeable, scar curve possessed better tribological than those others. Thus, play crucial role determining
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