Investigation of the Optoelectronic Properties of Ti-doped Indium Tin Oxide Thin Film.

作者: Nen-Wen Pu , Wei-Sheng Liu , Huai-Ming Cheng , Hung-Chun Hu , Wei-Ting Hsieh

DOI: 10.3390/MA8095316

关键词: Substrate (electronics)DopingMaterials scienceOptoelectronicsThin filmSputteringIndium tin oxideElectron mobilitySputter depositionTransparent conducting film

摘要: … The carrier mobility increase from 6 to 10 cm 2 /Vs that occurred as the substrate temperature was increased from 200 to 400 C was due to the improved crystallite agglomeration and …

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