Moving coil motor and implementations in MEMS based optical switches
作者： Shuyun Wu , Salleh Ismail , Viktoria Temesvary
DOI:
关键词: Electromagnetic coil 、 Galvanometer 、 Optical cavity 、 Electronic engineering 、 Microelectromechanical systems 、 Suspension (vehicle) 、 Magnetic field 、 Optical switch 、 Engineering 、 Structural integrity 、 Acoustics
摘要: A moving coil motor has an axisymmetric magnetic field applied to the drive coils on movable member of motor. The is suspended by springs. may be configured in a MEMS format, with and its suspension springs fabricated from mono-crystalline substance improve structural integrity. based motors array. Sensors are provided detect relative spatial positions member. include several tiers. In one application, support mirror surface form galvanometer, optical switch, or other component. Singular cavity facilitate tuning specific wavelengths while number array switches switching multi-channel network.
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