Method and apparatus for reducing taper of laser scribes
作者： Joseph G. Frankel , James N. O'brien
DOI:
关键词: Optics 、 Laser 、 Materials science 、 Beam tilt 、 Beam diameter 、 Laser beam quality 、 Beam parameter product 、 Line (geometry) 、 Perpendicular 、 Beam (structure)
摘要: Methods and apparatuses for reducing taper of a laser scribe in substrate are described. One method includes aiming beam at surface the first direction perpendicular to cutting it second direction. In each position, is tilted tilt angle with respect line surface. A single formed by applying while one opposite
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