Composition and microstructure of titanium nitride formed on Ti6Al4V by nitrogen plasma immersion ion implantation
作者： M. Rinner , K. Volz , W. Ensinger , W. Assmann , B. Rauschenbach
DOI: 10.1016/S0257-8972(97)00650-6
关键词: Nitride 、 Transmission electron microscopy 、 Ion implantation 、 Materials science 、 Elastic recoil detection 、 Nitrogen 、 Titanium nitride 、 Electron cyclotron resonance 、 Analytical chemistry 、 Mineralogy 、 Tin
摘要: Abstract Ti6Al4V has been treated with nitrogen Plasma Immersion Ion Implantation (PIII). Implantations high-voltage pulses have carried out at 50- and 400-Hz pulse repetition rates for varying process times in a plasma generated by electron cyclotron resonance (ECR) microwave excitation. Due to the different power input these rates, corresponding sample temperature reached 200 450 °C, respectively. Nitride formation was studied relation retained dose. The composition of modified surface layer determined elastic recoil detection analysis (ERD), structure morphology were means X-ray diffraction (XRD) cross-section transmission microscopy (XTEM). content increases total number irrespective rate. could be proved presence (200) TiN reflection. A homogeneous fine crystalline built up, exhibiting strong crystallographic orientation relationship substrate grains.
elsevier.com
sci-hub.se 参考文章(15)
W. Assmann, H. Huber, Ch. Steinhausen, M. Dobler, H. Glückler, A. Weidinger, Elastic recoil detection analysis with heavy ions Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 89, pp. 131- 139 ,(1994) , 10.1016/0168-583X(94)95159-4
S.M. Johns, T. Bell, M. Samandi, G.A. Collins, Wear resistance of plasma immersion ion implanted Ti6Al4V Surface & Coatings Technology. ,vol. 85, pp. 7- 14 ,(1996) , 10.1016/0257-8972(96)02884-8
J. Lausmaa, T. Röstlund, H. McKellop, WEAR OF ION IMPLANTED PURE TITANIUM AND Ti6Al4V ALLOY AGAINST ULTRAHIGH MOLECULAR WEIGHT POLYETHYLENE Surface Engineering. ,vol. 7, pp. 311- 318 ,(1991) , 10.1179/SUR.1991.7.4.311
A. Bergmaier, G. Dollinger, C.M. Frey, Quantitative elastic recoil detection Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 99, pp. 488- 490 ,(1995) , 10.1016/0168-583X(94)00666-0
J. R. Conrad, J. L. Radtke, R. A. Dodd, Frank J. Worzala, Ngoc C. Tran, Plasma source ion-implantation technique for surface modification of materials Journal of Applied Physics. ,vol. 62, pp. 4591- 4596 ,(1987) , 10.1063/1.339055
A. Anttila, J. Räisänen, J. Keinonen, Diffusion of nitrogen in α‐Ti Applied Physics Letters. ,vol. 42, pp. 498- 500 ,(1983) , 10.1063/1.93981
MunPyo Hong, Two-dimensional fluid modeling of time-dependent plasma sheath Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 12, pp. 889- 896 ,(1994) , 10.1116/1.587322
J. R. Conrad, Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes Journal of Applied Physics. ,vol. 62, pp. 777- 779 ,(1987) , 10.1063/1.339858
R. Hutchings, W.C. Oliver, A study of the improved wear performance of nitrogen-implanted Ti-6Al-4V Wear. ,vol. 92, pp. 143- 153 ,(1983) , 10.1016/0043-1648(83)90014-5
F Alonso, Marlene Rinner, A Loinaz, JI Onate, Wolfgang Ensinger, Bernd Rauschenbach, Characterization of Ti-6A1-4V modified by nitrogen plasma immersion ion implantation Surface & Coatings Technology. ,vol. 93, pp. 305- 308 ,(1997) , 10.1016/S0257-8972(97)00065-0