Elastic recoil detection analysis with heavy ions
作者： W. Assmann , H. Huber , Ch. Steinhausen , M. Dobler , H. Glückler
DOI: 10.1016/0168-583X(94)95159-4
关键词: Elastic recoil detection 、 Resolution (electron density) 、 Ion 、 Solid angle 、 Ionization 、 Detector 、 Atomic physics 、 Chemistry 、 Projectile 、 Particle
摘要: Detection of elastically scattered recoils instead projectiles offers the possibility to unambiguously identify sample components and is still a quantitative method for materials analysis. Large electrostatic accelerators delivering high energetic heavy ion beams excellent quality large area ionization detectors with particle position resolution are shown be very suited combination fully utilize potential ERDA method. Using 170 MeV I or 200 Au sensitivity below 1014atoms/cm2 depth 10 nm were obtained 7.5 msr detector solid angle. The enables correction kinematic energy shifts and, in addition, observation blocking patterns from single crystalline materials.
harvard.edu
elsevier.com
sci-hub.se 参考文章(34)
Leonard C. Feldman, Materials analysis by ion channeling ,(1982)
J.P. Stoquert, G. Guillaume, M. Hage-Ali, J.J. Grob, C. Ganter, P. Siffert, Determination of concentration profiles by elastic recoil detection with a ΔE−E gas telescope and high energy incident heavy ions Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 44, pp. 184- 194 ,(1989) , 10.1016/0168-583X(89)90426-6
G. Dollinger, T. Faestermann, C.M. Frey, A. Bergmaier, E. Schwabedissen, Th. Fischer, R. Schwarz, Depth microscopy at interfaces Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 85, pp. 786- 789 ,(1994) , 10.1016/0168-583X(94)95924-2
G. Dollinger, T. Faestermann, P. Maier-Komor, High resolution depth profiling of light elements Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 64, pp. 422- 427 ,(1992) , 10.1016/0168-583X(92)95508-O
Lawrence R. Doolittle, Algorithms for the rapid simulation of Rutherford backscattering spectra Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 9, pp. 344- 351 ,(1985) , 10.1016/0168-583X(85)90762-1
A.M. Behrooz, R.L. Headrick, L.E. Seiberling, R.W. Zurmühle, A UHV-compatible ΔE−E gas telescope for depth profiling and surface analysis of light elements Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 28, pp. 108- 112 ,(1987) , 10.1016/0168-583X(87)90044-9
H.J. Maier, High vacuum sputter deposition of nuclear accelerator targets Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment. ,vol. 303, pp. 172- 181 ,(1991) , 10.1016/0168-9002(91)90784-N
M. Petrascu, I. Berceanu, I. Brancus, A. Buta, M. Duma, C. Grama, I. Lazar, I. Mihai, M. Petrovici, V. Simion, M. Mihaila, I. Ghita, A method for analysis and profiling of boron, carbon and oxygen impurities in semiconductor wafers by recoil atoms in heavy ion beams Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 4, pp. 396- 398 ,(1984) , 10.1016/0168-583X(84)90585-8
W. Assmann, Ionization chambers for materials analysis with heavy ion beams Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 64, pp. 267- 271 ,(1992) , 10.1016/0168-583X(92)95478-A
Brad J. Burrow, Alan E. Morgan, Russell C. Ellwanger, A correlation of Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and Rutherford backscattering spectrometry measurements on sputter‐deposited titanium nitride thin films Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 4, pp. 2463- 2469 ,(1986) , 10.1116/1.574092