A UHV-compatible ΔE−E gas telescope for depth profiling and surface analysis of light elements
作者： A.M. Behrooz , R.L. Headrick , L.E. Seiberling , R.W. Zurmühle
DOI: 10.1016/0168-583X(87)90044-9
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摘要: Abstract We have developed a compact ΔE−E gas telescope that can easily be incorporated into standard ultrahigh vacuum ion scattering chamber. If energetic, heavy ions are available as primary beam, the used to detect light elastic recoils scattered from surface region of sample. The detector consists ionization chamber in front surface-barrier detector. energy loss signal (ΔE) is taken coincidence with (E) identify both atomic number and total recoil. design parameters been chosen allow detection elements H O good depth resolution (
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R.W. Zurmühle, L. Csihas, A ΔE-E telescope with very large solid angle Nuclear Instruments and Methods in Physics Research. ,vol. 203, pp. 261- 267 ,(1982) , 10.1016/0167-5087(82)90635-4
M. Petrascu, I. Berceanu, I. Brancus, A. Buta, M. Duma, C. Grama, I. Lazar, I. Mihai, M. Petrovici, V. Simion, M. Mihaila, I. Ghita, A method for analysis and profiling of boron, carbon and oxygen impurities in semiconductor wafers by recoil atoms in heavy ion beams Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 4, pp. 396- 398 ,(1984) , 10.1016/0168-583X(84)90585-8
R. Groleau, S.C. Gujrathi, J.P. Martin, Time-of-flight system for profiling recoiled light elements Nuclear Instruments and Methods in Physics Research. ,vol. 218, pp. 11- 15 ,(1983) , 10.1016/0167-5087(83)90946-8
C. Nölscher, K. Brenner, R. Knauf, W. Schmidt, Elastic recoil detection analysis of light particles (1H16O) using 30 MeV sulphur ions Nuclear Instruments and Methods in Physics Research. ,vol. 218, pp. 116- 119 ,(1983) , 10.1016/0167-5087(83)90965-1
J. L’Ecuyer, C. Brassard, C. Cardinal, J. Chabbal, L. Deschênes, J. P. Labrie, B. Terreault, J. G. Martel, R. St.‐Jacques, An accurate and sensitive method for the determination of the depth distribution of light elements in heavy materials Journal of Applied Physics. ,vol. 47, pp. 381- 382 ,(1976) , 10.1063/1.322288