Semiconductor processing apparatus having linear conveyer system

摘要: A transport system for manipulating a semiconductor wafer in processing tool is set forth. The includes unit guide disposed within the supporting transfer as moves between first position and second position. comprises frame, lateral rail mounted on series of magnetic segments arranged upon proximate rail. tram translatably attached to arm assembly wafer. An electromagnet cooperative relation with moving along Actuators are used controlling assembly, sensors determining assembly. controller remote directs movement response using actuators. communication link established actuators, controller. Preferably, fiber optic link.