SHIFTER FOR SEMICONDUCTOR WAFER

摘要: PURPOSE:To treat semiconductor wafers under ideal conditions, and to improve quality by providing a space changing means the spaces of plurality at time proceeding returning holding semiconductor-wafer support means. CONSTITUTION:When are shifted between first base section (a 'Teflon(R)' carrier) 28 second quartz 29, lever 7 is turned, 30 altered pitch changer 2 lifting lowering wafer supporter 1. Con sequently, large number varied desired stroke can be carrier 29. Accordingly, treated proper for CVD treatment, thus improving 30, then quickly shifting wafers.