The structures for electrostatic servo capacitive vacuum sensors
作者： Yuelin Wang , M. Esashi
DOI: 10.1016/S0924-4247(98)00037-5
关键词: Dynamic range 、 Optoelectronics 、 Electrical engineering 、 Servo 、 Getter 、 Servomechanism 、 Ultra-high vacuum 、 Chemistry 、 Vacuum pump 、 Voltage 、 Capacitive sensing
摘要: Abstract Two kinds of electrostatic servo capacitive vacuum sensors have been successfully fabricated using P++ silicon etch-stop and anodic-bonding techniques. In order to maintain the reference cavity at high vacuum, a non-evaporable getter (NEG) is used as small pump. The dynamic range sensor can be extended by system. pressure responses are good. plot voltage versus measured theoretical data agree with experimental results.
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