MHz Opto-mechanical Modulator
作者： C. Marxer , M.A. Gretillat , V.P. Jaecklin , R. Baettig , O. Anthamatten
DOI: 10.1109/SENSOR.1995.717175
关键词: Fiber laser 、 Optoelectronics 、 Optical modulator 、 Fabry–Pérot interferometer 、 Optical path 、 Surface micromachining 、 Materials science 、 Optics 、 Intensity modulation 、 Modulation 、 Electro-optic modulator
摘要: In this paper a Fabry-Perot modulator fabricated by surface micromachining is presented. The optimized for wavelength of 1.3 /spl mu/m and intended fiber-in-the- loop applications. It consists double-supported polysilicon beam separated from an underlying electrode air gap. two electrodes form the mirrors cavity. By electrostatic actuation optical path between can be reduced, which results in modulation reflectivity. Characterization shows maximum on-off ratio 9 dB. observed behaviour indicates rate 2.8 Mbit/s.
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