Selective ablation of thin films with short and ultrashort laser pulses
作者： J. Hermann , M. Benfarah , G. Coustillier , S. Bruneau , E. Axente
DOI: 10.1016/J.APSUSC.2005.06.057
关键词: Thin layers 、 Laser ablation 、 Thin film 、 Materials science 、 Ablation 、 Optics 、 X-ray laser 、 Sapphire 、 Semiconductor 、 Laser
摘要: … Q-switched Nd:YAG and excimer lasers and promising results … and thermophysical properties. First, the fraction of the … /Mo/glass sample irradiated with UV nanosecond laser pulses. …
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sci-hub.se 参考文章(9)
K Zimmer, J Dienelt, F Herfurth, A Braun, K Otte, G Lippold, V Gottschalch, F Bigl, Excimer laser etching of GaAs, AlxGa1−xAs and CuInSe2 in chlorine atmosphere Applied Surface Science. pp. 800- 804 ,(1998) , 10.1016/S0169-4332(97)00745-9
A.D Compaan, I Matulionis, S Nakade, Laser scribing of polycrystalline thin films Optics and Lasers in Engineering. ,vol. 34, pp. 15- 45 ,(2000) , 10.1016/S0143-8166(00)00061-0
Yoichi Hirayama, Minoru Obara, Heat effects of metals ablated with femtosecond laser pulses Applied Surface Science. ,vol. 197, pp. 741- 745 ,(2002) , 10.1016/S0169-4332(02)00403-8
Adolf Goetzberger, Christopher Hebling, Photovoltaic materials, past, present, future Solar Energy Materials and Solar Cells. ,vol. 62, pp. 1- 19 ,(2000) , 10.1016/S0927-0248(99)00131-2
J. Bonse, M. Geuss, S. Baudach, H. Sturm, W. Kautek, The precision of the femtosecond-pulse laser ablation of TiN films on silicon Applied Physics A. ,vol. 69, pp. 399- 402 ,(1999) , 10.1007/S003390051425
S. Boggs, Jinbo Kuang, I. Andoh, S. Nishiwaki, Increased energy absorption in ZnO arrester elements through control of electrode edge margin IEEE Transactions on Power Delivery. ,vol. 15, pp. 562- 568 ,(2000) , 10.1109/61.852985
Yurii P Raĭzer, Breakdown and heating of gases under the influence of a laser beam Physics-Uspekhi. ,vol. 8, pp. 650- 673 ,(1966) , 10.1070/PU1966V008N05ABEH003027
V. Craciun, S. Amirhaghi, D. Craciun, J. Elders, J.G.E. Gardeniers, Ian W. Boyd, Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition Applied Surface Science. ,vol. 86, pp. 99- 106 ,(1995) , 10.1016/0169-4332(94)00405-6
Robert R. Gay, Status and prospects for CIS-based photovoltaics Solar Energy Materials and Solar Cells. ,vol. 47, pp. 19- 26 ,(1997) , 10.1016/S0927-0248(97)00020-2