作者: Z. Montiel-González , S.E. Rodil , S. Muhl , A. Mendoza-Galván , L. Rodríguez-Fernández
DOI: 10.1016/J.TSF.2011.03.024
关键词: Raman spectroscopy 、 Amorphous carbon 、 Ellipsometry 、 Physical vapor deposition 、 Analytical chemistry 、 Thin film 、 Nanocomposite 、 High-resolution transmission electron microscopy 、 Materials science 、 Carbon film
摘要: Abstract Spectroscopic Ellipsometry was used to determine the optical and structural properties of amorphous carbon:gold nanocomposite thin films deposited by dc magnetron co-sputtering at different deposition power. The incorporation gold as small particles distributed in carbon matrix confirmed X-ray Diffraction, Rutherford Backscattering measurements High Resolution Transmission Electron Microscopy. Based on these results, an model for developed using Maxwell–Garnett effective medium with Drude–Lorentz representing response Tauc–Lorentz carbon. volume fraction particle size obtained from fitting processes were comparable those physical characterization. analysis ellipsometric spectra all samples showed strong changes a consequence incorporation. These correlated modification observed Raman Spectroscopy, which indicated clustering sp 2 phase subsequent decrease gap. Finally, Reflection Spectroscopy carried out Microscopy images order support results.