WO3 and WTiO thin-film gas sensors prepared by sol–gel dip-coating
作者： J. Shieh , H.M. Feng , M.H. Hon , H.Y. Juang
DOI: 10.1016/S0925-4005(02)00150-8
关键词: Tungsten 、 Chemical engineering 、 Materials science 、 Substrate (electronics) 、 Thin film 、 Doping 、 Raman spectroscopy 、 Inorganic chemistry 、 Titanium 、 Dip-coating 、 Sol-gel
摘要: Abstract The WO3 and WTiO thin-films were prepared by sol–gel dip-coating on alumina substrate using tungsten chloride, 2,4-pentanedione (PTN), ethanol water as sources calcined at 400 °C. structure was characterized XRD, Raman, SEM TEM analyses. effect of titanium doping the then discussed related to gas sensing properties. results show that sensitivities for detecting 10 ppm NO2 82 1768 sensors 200 °C, respectively. huge increase in sensitivity adding ion arose from grain size reduction films Debye length. improved sensitivity, recovery, reliability suggest can be used sensing.
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