作者: J. Tsuda , Y. Tada , G. Hashiguchi , K. Hirano , N. Kaji
DOI: 10.1007/978-94-010-0295-0_36
关键词: Chip 、 Bulk micromachining 、 Silicon micromachining 、 Hybrid silicon laser 、 Materials science 、 Nanotechnology 、 Pillar 、 Surface micromachining 、 Gel electrophoresis of nucleic acids 、 Fabrication
摘要: We have developed a new fabrication technique of DNA electrophoresis chip having minute pillar array in the electrophoretic channel by silicon micromachining technology.