On-the-fly manipulation of spot size and cutting speed for real-time control of trench depth and width in laser operations

摘要: Systems and methods cut trenches of multiple widths in a material using single pass laser beam. A first series pulses work surface the at cutting speed spot size. In transition region from trench width to second width, sequentially change sizes while gradually changing speed. Then, third continue The method provides for increased depth control region. system uses selectively adjustable optical component beam path rapidly size by adjusting position focal plane with respect surface.