Combined scanning force microscope and optical metrology tool

摘要: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth width of a trench in sample. The probe remains fixed while sample moved relative to probe. detects proximity side walls trench, providing output signals indicating vertical transverse relationship adjusts position vertically transversely as function signals. Variety probes can be used with this detect trench. should have at least one protuberance extending down sense bottom tip Lateral protuberances extend opposite directions (across trench) from Forces on are measured determine location