作者: Hiroshi Kajimura , Hirofumi Miyamoto , Hiroko Ohta , Tsugiko Takase , Shuzo Mishima
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摘要: An atomic force microscope comprises a probe having sharply-pointed tip end. The is supported on the free end portion of cantilever and close to surface specimen. When an interatomic produced, deformed, displaced. displacement detected by optical system. A light beam emitted from source collimated lens, reflected polarized beam-splitter, also half-mirror. Then, passes through quarter wavelength plate objective such that converged cantilever. returns along same path splitter. divided into two beams at These are respective prisms then incident photodetectors. photodetectors detect probe.