Ultrafine silicon tips for AFM/STM profilometry
作者： Johann Greschner , Helga Weiss , Hemantha K. Wickramasinghe , Olaf Wolter , Thomas Bayer
DOI:
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摘要: An ultrafine tip for AFM and STM profilometry of trenches having sidewalls. The includes a lateral circumferential edge protrusion to allow the sidewalls trench located in semiconductor or insulator substrate.
lens.org 参考文章(11)
Hiroyuki Kado, Takao Tohda, Cantilever stylus for use in an atomic force microscope and method of making same ,(1991)
Johann Dr. Greschner, Thomas Bayer, Method of producing micromechanical sensors for the AFM/STM/MFM profilometry and micromechanical AFM/STM/MFM sensor head ,(1990)
Bojan Petek, Michael Hatzakis, Kam L. Lee, Joachim G. Clabes, John C. Slonczewski, Nanometer scale probe for an atomic force microscope, and method for making the same ,(1991)
Nicholas C. Andreadakis, Tirunelveli S. Ravi, Robert B. Marcus, Device including a tapered microminiature silicon structure ,(1992)
Philip Charles Danby Hobbs, Martin Patrick O'boyle, Calvin Kei-Ping Chi, Laszlo Landstein, Sandra Kay Wolterman, Henri Antoine Khoury, Joachim Gerhard Clabes, Hemantha Kumar Wickramasinghe, Combined scanning force microscope and optical metrology tool ,(1992)
Shinya Akamine, Mark J. Zdeblick, Thomas R. Albrecht, Thomas E. Carver, Microfabricated cantilever stylus with integrated pyramidal tip ,(1994)
Nicholas C. Andreadakis, Robert B. Marcus, Method for making tapered microminiature silicon structures ,(1991)
Johann Greschner, Johann W. Bartha, Helga Weiss, Georg Kraus, Olaf Wolter, Thomas Bayer, Method of producing micromechanical sensors for the afm/stm profilometry ,(1990)
Jordan Poler, Yves Martin, Hemantha K. Wickramasinghe, Surface profiling using scanning force microscopy ,(1993)
Johann Dr. Dipl.-Phys. Greschner, Helga Weiss, Hemantha K. Dr. Dipl.-Phys. Wickramasinghe, Olaf Dr. Dipl.-Phys. Wolter, Thomas Bayer, Yves Dr. Dipl.-Phys. Martin, Method of producing ultrafine silicon tips for the AFM/STM profilometry ,(1989)