Microfabricated cantilever stylus with integrated pyramidal tip
作者： Shinya Akamine , Mark J. Zdeblick , Thomas R. Albrecht , Thomas E. Carver
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摘要: A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The molded in a pit etched later-removed (100) silicon substrate. An integrally-formed also as the being formed. Various thin film materials form and tip. In one embodiment of invention, nitride. anodically bonded to glass block.
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