Method of fabricating a surface probing device
作者： Stephen C. Minne
DOI:
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摘要: A method of making a probe having cantilever and tip include providing substrate surface forming extending substantially orthogonally from the surface. The includes depositing an etch stop layer on substrate, whereby protects during process. silicon nitride is then deposited layer. An operation used to release expose protecting tip. Preferably, supporting tip, preferably via layer, nitride. for analysis instrument made according thickness defined deposition
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