Control of the morphology of CSD-prepared (Ba,Sr)TiO3 thin films
作者： Susanne Hoffmann , Rainer Waser
DOI: 10.1016/S0955-2219(98)00430-0
关键词: Chemical engineering 、 Mineralogy 、 Microstructure 、 Silicon 、 Thin film 、 Dielectric 、 Nucleation 、 Carbon film 、 Strontium titanate 、 Materials science 、 Crystallization
摘要: … consisting of typically 5 to 20 layers was annealed in oxygen for about 15 min. … analyzed the CSD process for the deposition of (Ba,Sr)TiO 3 thin films on Pt/Si substrates with respect to: …
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