Thin Film Multilayer Capacitors
作者： Hiroyuki Kambara , Theodor Schneller , Rainer Waser
DOI: 10.1007/978-3-211-99311-8_22
关键词: Miniaturization 、 Optoelectronics 、 Materials science 、 Film capacitor 、 Tape casting 、 Dielectric 、 Capacitor 、 Thin film 、 Ceramic capacitor 、 Capacitance
摘要: The application of ferroelectric and dielectric materials for capacitors is reviewed in this chapter with a focus on multilayer stacks. As the trend to miniaturization high-tech electronic devices recent years requires electric parts mounted them be smaller smaller, technology ceramic (MLCC) also continues developed downsizing increasing capacitance. Thus firstly aspects mature fabrication MLCC are briefly reviewed, followed by introduction new concepts further using thin film deposition technologies. Then design (TMC) terms electrode materials, processing issues, patterning aspects, electrical properties discussed.
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