X-ray reflectivity study of the structural characteristics of BaTiO3/LaNiO3 superlattice

作者: Yuan-Chang Liang , Tai-Bor Wu , Hsin-Yi Lee , Heng-Jui Liu

DOI: 10.1016/J.TSF.2004.06.195

关键词: Sputter depositionScatteringSpecular reflectionCondensed matter physicsCrystalSuperlatticeSurface roughnessSurface finishX-ray reflectivityChemistryOptics

摘要: An artificial superlattice of BaTiO3/LaNiO3 (BTO/LNO) was grown epitaxially on an Nb-doped SrTiO3 (001) single-crystalline substrate with a dual-gun rf magnetron sputtering system. The structural characteristics the films were studied mainly by X-ray reflectivity. Formation structure confirmed from appearance Bragg peaks separated Kiessig fringes in reflectivity curves and crystal truncation rod (CTR) spectrum. surface interfacial roughness derived fitted for specular A conformal relationship between consecutive BTO LNO layers observed off-specular scattering. According to results atomic-force microscopy images, evolution follows Stranski–Krastanov (S–K) growth mode, which increased thickening sublayers.

参考文章(28)
P. Lunkenheimer, V. Bobnar, A. V. Pronin, A. I. Ritus, A. A. Volkov, A. Loidl, Origin of apparent colossal dielectric constants Physical Review B. ,vol. 66, pp. 052105- ,(2002) , 10.1103/PHYSREVB.66.052105
Takaaki Tsurumi, Tomoyoshi Ichikawa, Terukiyo Harigai, Hirofumi Kakemoto, Satoshi Wada, Dielectric and optical properties of BaTiO3/SrTiO3 and BaTiO3/BaZrO3 superlattices Journal of Applied Physics. ,vol. 91, pp. 2284- 2289 ,(2002) , 10.1063/1.1433180
Juho Kim, Youngnam Kim, Young Sung Kim, Jaichan Lee, Leejun Kim, Donggeun Jung, Large nonlinear dielectric properties of artificial BaTiO3/SrTiO3 superlattices Applied Physics Letters. ,vol. 80, pp. 3581- 3583 ,(2002) , 10.1063/1.1477934
J. C. Jiang, X. Q. Pan, W. Tian, C. D. Theis, D. G. Schlom, Abrupt PbTiO3/SrTiO3 superlattices grown by reactive molecular beam epitaxy Applied Physics Letters. ,vol. 74, pp. 2851- 2853 ,(1999) , 10.1063/1.124035
W. C. Goh, S. Y. Xu, S. J. Wang, C. K. Ong, Microstructure and growth mode at early growth stage of laser-ablated epitaxial Pb(Zr0.52Ti0.48)O3 films on a SrTiO3 substrate Journal of Applied Physics. ,vol. 89, pp. 4497- 4502 ,(2001) , 10.1063/1.1356426
S.K. Sinha, Reflectivity using neutrons or X-rays? A critical comparison Physica B-condensed Matter. ,vol. 173, pp. 25- 34 ,(1991) , 10.1016/0921-4526(91)90031-9
Hitoshi Tabata, Hidekazu Tanaka, Tomoji Kawai, Formation of artificial BaTiO3/SrTiO3superlattices using pulsed laser deposition and their dielectric properties Applied Physics Letters. ,vol. 65, pp. 1970- 1972 ,(1994) , 10.1063/1.112837
Hsin-Yi Lee, Wei-Der Chang, C.-H Hsu, K.S Liang, J.Y Lee, J.Y Juang, K.H Wu, T.M Uen, Y.S Gou, X-Ray scattering study of crystallization behavior in homoepitaxial growth of SrTiO3 films Thin Solid Films. ,vol. 418, pp. 163- 168 ,(2002) , 10.1016/S0040-6090(02)00770-8
J. Eymery, J.M. Hartmann, G.T. Baumbach, Interface dilution and morphology of CdTe/MnTe superlattices studied by small angle X-ray scattering Journal of Crystal Growth. pp. 109- 113 ,(1998) , 10.1016/S0022-0248(98)80304-7
M. Sugawara, M. Kondo, S. Yamazaki, K. Nakajima, Exact determination of superlattice structures by small‐angle x‐ray diffraction method Applied Physics Letters. ,vol. 52, pp. 742- 744 ,(1988) , 10.1063/1.99342