作者: Yuan-Chang Liang , Tai-Bor Wu , Hsin-Yi Lee , Heng-Jui Liu
DOI: 10.1016/J.TSF.2004.06.195
关键词: Sputter deposition 、 Scattering 、 Specular reflection 、 Condensed matter physics 、 Crystal 、 Superlattice 、 Surface roughness 、 Surface finish 、 X-ray reflectivity 、 Chemistry 、 Optics
摘要: An artificial superlattice of BaTiO3/LaNiO3 (BTO/LNO) was grown epitaxially on an Nb-doped SrTiO3 (001) single-crystalline substrate with a dual-gun rf magnetron sputtering system. The structural characteristics the films were studied mainly by X-ray reflectivity. Formation structure confirmed from appearance Bragg peaks separated Kiessig fringes in reflectivity curves and crystal truncation rod (CTR) spectrum. surface interfacial roughness derived fitted for specular A conformal relationship between consecutive BTO LNO layers observed off-specular scattering. According to results atomic-force microscopy images, evolution follows Stranski–Krastanov (S–K) growth mode, which increased thickening sublayers.