Materials analysis with a position-sensitive atom probe
作者： A. Cerezo , T. J. Godfrey , C. R. M. Grovenor , M. G. Hetherington , R. M. Hoyley
DOI: 10.1111/J.1365-2818.1989.TB00584.X
关键词: Atom probe 、 Microscope 、 Detector 、 Field ion microscope 、 Resolution (electron density) 、 Mass spectrometry 、 Ion 、 Chemistry 、 Semiconductor 、 Analytical chemistry
摘要: SUMMARY A position-sensitive detector has been combined with time-of-flight mass spectrometry in the atom probe field-ion microscope to yield a system which both chemical identity and spatial information are obtained for individual ions field-evaporated from specimen surface. This allows variations composition originally present sample be reconstructed 3-D sub-nanometre resolution. The prototype is being used study phase chemistry number of metallurgical alloys, including accurate determination 1–2 nm Cu-rich precipitates formed Fe–1.3% Cu–1.4%Ni aged peak hardness. Other applications (POSAP) include analysis surface layers on superconductors studies semiconductor multiple quantum wells. These initial instrument reported, limitations intended improvements discussed.
sci-hub.se 参考文章(21)
J. G. Bednorz, K. A. M�ller, Possible high Tc superconductivity in the Ba-La-Cu-O system European Physical Journal B. ,vol. 64, pp. 189- 193 ,(1986) , 10.1007/BF01303701
Erwin W. Müller, S.V. Krishnaswamy, Energy deficits in pulsed field evaporation and deficit compensated atom‐probe designs Review of Scientific Instruments. ,vol. 45, pp. 1053- 1059 ,(1974) , 10.1063/1.1686808
Uzi Landman, George G. Kleinman, Local and nonlocal effects in the theory of physisorption Journal of Vacuum Science and Technology. ,vol. 12, pp. 206- 209 ,(1975) , 10.1116/1.568759
R. GRÜNE, A. HÜTTEN, L. v. ALVENSLEBEN, ORDERING IN METALLIC ALLOYS BY FIM-ATOM PROBE TECHNIQUES Le Journal De Physique Colloques. ,vol. 47, pp. 295- 300 ,(1986) , 10.1051/JPHYSCOL:1986751
J. A. Panitz, The 10 cm Atom Probe Review of Scientific Instruments. ,vol. 44, pp. 1034- 1038 ,(1973) , 10.1063/1.1686295
C. Martin, P. Jelinsky, M. Lampton, R. F. Malina, H. O. Anger, Wedge‐and‐strip anodes for centroid‐finding position‐sensitive photon and particle detectors Review of Scientific Instruments. ,vol. 52, pp. 1067- 1074 ,(1981) , 10.1063/1.1136710
G.M. Worrall, J.T. Buswell, C.A. English, M.G. Hetherington, G.D.W. Smith, A study of the precipitation of copper particles in a ferrite matrix Journal of Nuclear Materials. ,vol. 148, pp. 107- 114 ,(1987) , 10.1016/0022-3115(87)90525-3
A. Cerezo, T. J. Godfrey, G. D. W. Smith, Application of a position-sensitive detector to atom probe microanalysis Review of Scientific Instruments. ,vol. 59, pp. 862- 866 ,(1988) , 10.1063/1.1139794
S. R. Goodman, S. S. Brenner, J. R. Low, An FIM-atom probe study of the precipitation of copper from lron-1.4 at. pct copper. Part II: Atom probe analyses Metallurgical Transactions. ,vol. 4, pp. 2371- 2378 ,(1973) , 10.1007/BF02669377
M. G. Hetherington, A. Cerezo, J. P. Jakubovics, G. D.W. Smith, OBSERVATIONS ON THE MICROSTRUCTURE AND MAGNETIZATION OF ALNICO PERMANENT MAGNETS Le Journal De Physique Colloques. ,vol. 45, pp. 429- 434 ,(1984) , 10.1051/JPHYSCOL:1984971