Concepts in atom probe designs

摘要: Three new variants of the three-dimensional atom probe (3DAP), parallel (PAP), mapping (MAP), and optical (OAP) are described. These probes permit elemental reconstruction a small volume specimen with near atomic resolution. The PAP detector consists pair channel plates two dimensional array either anodes or photodiodes one timing per anode photodiode. MAP has consisting Z-stack square multianode array. In MAP, both stop signal accumulated electron charge is determined from each anode, thereby improving spatial resolution over PAP. OAP serial version that uses digitized video an imaging separate time phosphor screen to provide x y positions mass-to-charge ratio individual ions striking detector.