摘要: Atom probe tomography is a characterization technique for the analysis of microstructure materials at atomic level. The basic concepts atom and field ion microscopy, implementations microscope three-dimensional probe, including state-of-the-art local electrode laser voltage pulsing methods evaporation are outlined in this chapter. Methods specimen preparation by electropolishing focused beam described. An overview data visualization as well mining techniques presented. Keywords: field microscopy (FIM); atom (APFIM); atom (APT); three-dimensional (3DAP); local (LEAP); field
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