Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays
作者： R.K. Franklin , M.D. Johnson , K.A. Scottt , Jun Ho Shim , Hakhyun Nam
DOI: 10.1109/ICSENS.2005.1597971
关键词: Silicon 、 Electrode 、 Materials science 、 Reference electrode 、 Auxiliary electrode 、 Microelectrode 、 Analytical chemistry 、 Palladium-hydrogen electrode 、 Microelectromechanical systems 、 Iridium oxide
摘要: We report for the first time a micromachined, silicon neural probe with an integrated iridium oxide (IrO) quasi reference electrode neurochemical recordings. The probes have 1.5 times 103 mum2 IrO electrode, Pt counter three circular working electrodes, and electrodes electrical recording. Several different sizes (4 to 50 mum radius) were fabricated in order study effects of size. In vitro evaluation demonstrated close correlation between results obtained using Ag/AgCl on-chip IrOx
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