Design and Implementation of a Micron-Sized Electron Column Fabricated by Focused Ion Beam Milling
作者： Conrad Escher , Jean-Nicolas Longchamp , Hans-Werner Fink , Flavio Wicki
DOI:
关键词: Focused ion beam 、 Column (typography) 、 Scaling 、 Kinetic energy 、 Physics 、 Lens (optics) 、 Optical axis 、 Electron 、 Optics 、 Wavefront
摘要: We have designed, fabricated and tested a micron-sized electron column with an overall length of about 700 microns comprising two lenses; micro-lens minimal bore 1 micron followed by second lens up to 50 in diameter shape coherent low-energy wave front. The design criteria follow the notion scaling down source size, lens-dimensions kinetic energy for minimizing spherical aberrations ensure parallel All apertures been milled employing focused ion beam could thus be precisely aligned within tolerance 300 nm from optical axis. Experimentally, final shapes quasi-planar front full divergence angle 4 mrad energies as low 100 eV.
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arxiv.org参考文章(14)
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