Double aberration correction in a low-energy electron microscope.
作者： Th. Schmidt , H. Marchetto , P.L. Lévesque , U. Groh , F. Maier
DOI: 10.1016/J.ULTRAMIC.2010.07.007
关键词:
摘要: The lateral resolution of a surface sensitive low-energy electron microscope (LEEM) has been improved below 4 nm for the first time. This breakthrough only possible by simultaneously correcting unavoidable spherical and chromatic aberrations lens system. We present an experimental criterion to quantify aberration correction optimize optical obtained 2.6 in LEEM enables sensitive, microscopic observation herringbone reconstruction on Au(1 1 1) surface.
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