A versatile ultra high vacuum sample stage with six degrees of freedom.
作者： A. W. Ellis , R. M. Tromp
DOI: 10.1063/1.4813739
关键词:
摘要: We describe the design and practical realization of a versatile sample stage with six degrees freedom. The was designed for use in Low Energy Electron Microscope, but its basic features will be useful numerous other applications. freedom are X, Y, Z, two tilts, azimuth. All motions actuated an ultrahigh vacuum base pressure environment by piezoelectric transducers integrated position sensors. can load-locked. During observation, is held at potential −15 kV, temperatures between room temperature 1500 °C, background gas pressures up to 1 × 10−4 Torr.
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