In situ surface roughness measurement using a laser scattering method

作者: C.J Tay , S.H Wang , C Quan , H.M Shang

DOI: 10.1016/S0030-4018(03)01102-7

关键词: Materials scienceLight scatteringCoaxialOpticsSurface roughnessLaser diodeScatteringPhotodiodeSurface finishMachining

摘要: Abstract In this paper, the design and development of an optical probe for in situ measurement surface roughness are discussed. Based on light scattering principle, which consists a laser diode, measuring lens linear photodiode array, is designed to capture scattered from test with relatively large angle ϕ (=28°). This capability increases range enhances repeatability results. The coaxial arrangement that incorporates dual-laser beam constant compressed air stream renders proposed system insensitive movement or vibration as well conditions. Tests were conducted workpieces mounted turning machine operates different cutting speeds. Test specimens underwent machining processes finish also studied. results obtained demonstrate feasibility using method.

参考文章(23)
Petr Beckmann, Andre Spizzichino, The scattering of electromagnetic waves from rough surfaces ,(1963)
Lars Mattsson, Jean M. Bennett, Introduction to Surface Roughness and Scattering ,(1999)
Theodore V. Vorburger, Egon Marx, Thomas R. Lettieri, Regimes of surface roughness measurable with light scattering Applied Optics. ,vol. 32, pp. 3401- 3408 ,(1993) , 10.1364/AO.32.003401
D. Léger, E. Mathieu, J. C. Perrin, Optical surface roughness determination using speckle correlation technique. Applied Optics. ,vol. 14, pp. 872- 877 ,(1975) , 10.1364/AO.14.000872
J.Q. Whitley, R.P. Kusy, M.J. Mayhew, J.E. Buckthal, Surface roughness of stainless steel and electroformed nickel standards using a HeNe laser Optics & Laser Technology. ,vol. 19, pp. 189- 196 ,(1987) , 10.1016/0030-3992(87)90065-X
W. T. Welford, Optical estimation of statistics of surface roughness from light scattering measurements Optical and Quantum Electronics. ,vol. 9, pp. 269- 287 ,(1977) , 10.1007/BF00619527
J M Bennett, Recent developments in surface roughness characterization Measurement Science and Technology. ,vol. 3, pp. 1119- 1127 ,(1992) , 10.1088/0957-0233/3/12/001
J. Kagami, T. Hatazawa, K. Koike, Measurement of surface profiles by the focusing method Wear. ,vol. 134, pp. 221- 229 ,(1989) , 10.1016/0043-1648(89)90126-9
S.H. Wang, C.J. Tay, C. Quan, H.M. Shang, Collimating of diverging laser diode beam using graded-index optical fiber Optics and Lasers in Engineering. ,vol. 34, pp. 121- 127 ,(2000) , 10.1016/S0143-8166(00)00089-0
C. J. Tay, S. L. Toh, H. M. Shang, J. Zhang, Whole-field determination of surface roughness by speckle correlation. Applied Optics. ,vol. 34, pp. 2324- 2335 ,(1995) , 10.1364/AO.34.002324