Ablation plume particle dynamics during excimer laser ablation of polyimide
作者： D. W. Hahn , M. N. Ediger , G. H. Pettit
DOI: 10.1063/1.358745
关键词: Particle size 、 Analytical chemistry 、 Carbon 、 Plume 、 Raman spectroscopy 、 Excimer laser 、 Scanning electron microscope 、 Ablation 、 Materials science 、 Soot
摘要: The dynamics of polyimide ablation plume particles generated during ArF excimer laser (193 nm) were investigated using time‐resolved, light scattering and Raman spectroscopy. evolution particle size is determined over a range 300–1150 μm above the polymer target surface. Raman‐scattering measurements allow in situ identification composition, which equivalent to flame soot. total mass particulate carbon within accounts for approximately 1% ablated polyimide. Scanning electron microscopy was used examine morphology collected particles, found correlate remarkably with light‐scattering results. formation apparently complete 500 surface, corresponding time scale 30 μs, then gives way oxidation at greater heights. It concluded tha...
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