作者: Chern-Yow Hsu , Xiaomeng Chen , Shih-Chang Liu , Chia Shiung Tsai , Chen-Jong Wang
DOI:
关键词: Semiconductor 、 Materials science 、 Optoelectronics 、 Dielectric 、 Semiconductor device 、 Layer (electronics) 、 Capacitor 、 Electrode 、 Electrical engineering
摘要: A semiconductor arrangement includes a logic region and memory region. The has an active that device. also capacitor within one or more dielectric layers over the protective ring at least of separates from first electrode, second electrode insulating layer between where unit portion portion, is above wider than portion.