A Flowmeter with Piezoresistive Metal Layer Deposited with Focused-Ion-Beam System
作者： Dae Keun Choi , Sang Hoon Lee
DOI: 10.1080/10584587.2014.912910
关键词: Optoelectronics 、 Materials science 、 Piezoresistive effect 、 Focused ion beam 、 Flow measurement 、 Microelectromechanical systems 、 Electrical resistivity and conductivity 、 Layer (electronics) 、 Analytical chemistry 、 Sensitivity (electronics) 、 Gallium
摘要: In this paper, we fabricated and evaluated a flowmeter with sub-micron sized piezoresistive layer for the measurement in small area. For area detection, sensing material should be reduced as well sensor body. We use FIB system to reduce size of obtain line width. The device is standard MEMS process, platinum selected considering electrical conductivity. 0∼4m/s air flows are applied experimental results shows negative sensitivity output -3.22E−5/ms−1. This value due additional materials like carbon gallium. various experiments including stability repeatability performed, repeated operation stable signals less than 9.6% variation. Through those experiment results, assisted suitable detection can a...
sci-hub.se 参考文章(19)
Chunyan Tian, Ning Liu, Maohua Lu, Effect of WC on microstructure and mechanical properties of silicon nitride nano-composites Journal of Materials Processing Technology. ,vol. 205, pp. 411- 418 ,(2008) , 10.1016/J.JMATPROTEC.2007.11.200
Estíbaliz Sánchez-González, Pedro Miranda, Fernando Guiberteau, Antonia Pajares, Effect of temperature on the pre-creep mechanical properties of silicon nitride Journal of The European Ceramic Society. ,vol. 29, pp. 2635- 2641 ,(2009) , 10.1016/J.JEURCERAMSOC.2009.03.011
Sung-Cheoul Roh, Yong-Moon Choi, Soo-Yong Kim, Sensitivity enhancement of a silicon micro-machined thermal flow sensor Sensors and Actuators A-physical. ,vol. 128, pp. 1- 6 ,(2006) , 10.1016/J.SNA.2005.05.007
Y Su, A G R Evans, A Brunnschweiler, G Ensell, Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing Journal of Micromechanics and Microengineering. ,vol. 12, pp. 780- 785 ,(2002) , 10.1088/0960-1317/12/6/309
Rong-Hua Ma, Chia-Yen Lee, Yu-Hsiang Wang, Hao-Jen Chen, Microcantilever-based weather station for temperature, humidity and flow rate measurement Microsystem Technologies. ,vol. 14, pp. 971- 977 ,(2008) , 10.1007/S00542-007-0458-2
Yuhua Ma, Shuangyu Ma, Tieliu Wang, Weiling Fang, AIR-FLOW SENSOR AND HUMIDITY SENSOR APPLICATION TO NEONATAL INFANT RESPIRATION MONITORING Sensors and Actuators A-physical. ,vol. 49, pp. 47- 50 ,(1995) , 10.1016/0924-4247(95)01014-R
C. Song, A.R. Aiyar, S.-H. Kim, M.G. Allen, Exploitation of aeroelastic effects for drift reduction, in an all-polymer air flow sensor Sensors and Actuators A-physical. ,vol. 165, pp. 66- 72 ,(2011) , 10.1016/J.SNA.2010.01.008
V. Goedseels, Sensor for Continuous Measurement of the Ventilation Rate in Livestock Buildings Indoor Air. ,vol. 1, pp. 323- 336 ,(1991) , 10.1111/J.1600-0668.1991.09-13.X
Rainer Buchner, Christoph Sosna, Marcus Maiwald, Wolfgang Benecke, Walter Lang, A high-temperature thermopile fabrication process for thermal flow sensors Sensors and Actuators A-physical. ,vol. 130, pp. 262- 266 ,(2006) , 10.1016/J.SNA.2006.02.009
Chia-Yen Lee, Chih-Yung Wen, Hui-Hsiung Hou, Ruey-Jen Yang, Chien-Hsiung Tsai, Lung-Ming Fu, Design and characterization of MEMS-based flow-rate and flow-direction microsensor Microfluidics and Nanofluidics. ,vol. 6, pp. 363- 371 ,(2009) , 10.1007/S10404-008-0381-6