Design and characterization of MEMS-based flow-rate and flow-direction microsensor

摘要: This study designs and characterizes a novel MEMS-based flow-rate micro-sensor consisting of platinum resistor deposited on silicon nitride-coated cantilever beam. Due to the difference between thermal conductivities nitride film beam, tip structure bends slightly in upward direction. As air travels across upper surface sensor, it interferes with curved displaces beam either or downward The resulting change signal is then used calculate velocity air. A flow-direction constructed by arranging eight structures an octagonal platform. Each separated from its neighbors tapered baffle plate connected central pillar designed attenuate aerodynamic force acting beams. By measuring signals each beams, capable both flow rate direction passing over sensor. numerical investigation performed examine effects height pillar-to-tip gap airflow distribution, pressure bending moment sensor sensitivity. results show that optimum performance obtained using 0.75 mm 5 mm. Moreover, sensitivity sensing platform found be approximately 90% single