On the design of GaAs (hhl) resonant cantilevers: Study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure

摘要: Abstract This paper reports on GaAs micro-resonators with torsional vibration modes. An analytical model is used to design better resonant {hhl} cantilevers. In particular geometry of (4 4 1) and (1 1 4) resonators are optimized for specific alignments the cantilever. The temperature response resonance frequency also given. A piezoresistive four-terminal element sense changes in induced by a mechanical input. Sensitivity non-linearity transverse output voltage studied two selected orientations showing that orientation preferable. cantilever fabricated micromachining. Hence, simulator TENSOSIM predict etching shapes at opening structure after subsequent etchings. Here, again results call choice beam. Finally, performances final micro-resonator sensor evaluated special emphasis errors caused misalignments or some uncertainty about angle cut. study shows piezoelectric excitation detection open up new sensors applications.