Force sensor and manufacture method thereof
作者： Tseng Li-Tien , Chien Yu-Hao , Yeh Yu-Te , Kuo Chih-Liang
DOI:
关键词: Optoelectronics 、 Electrode 、 Force sensor 、 Microelectromechanical systems 、 Substrate (printing) 、 Electrical conductor 、 Pillar 、 Materials science
摘要: A force sensor comprises a first substrate, second third and package body. The substrate includes fixed electrode, at least one conductive contact, contact. is disposed on the electrically connected to contact of substrate. micro-electro-mechanical system (MEMS) element corresponding electrode. pillar MEMS element. body covers foregoing has better reliability.
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