Pressure sensor and method of manufacturing the same
作者： Ryunosuke Gando , Yumi Hayashi , Daiki Ono , Naofumi Nakamura
DOI:
关键词:
摘要: According to one embodiment, a pressure sensor includes fixed electrode on substrate, movable provided above the electrode, so as be in vertical directions, thin-film structure of dome shape, forming, together with cavity accommodate and communicating hole communicate an outside structure. A voltage is applied between measure mechanical displacement electrode.
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