Physical quantity sensor, electronic device, and moving object
作者： Satoru Tanaka
DOI:
关键词: Physical quantity 、 Optoelectronics 、 Substrate (printing) 、 Electrode 、 Materials science 、 Object (computer science)
摘要: A physical quantity sensor according to the embodiment includes: a substrate; first movable body which is disposed on substrate, can be displaced around support shaft, and includes electrode portion; second fixed portion overlapped substrate in plan view.
lens.org 参考文章(15)
Ryan Roehnelt, Michael Cohn, High precision accelerometer ,(2002)
Satoru Tanaka, Physical quantity sensor, manufacturing method thereof, and electronic apparatus ,(2013)
Johannes Classen, Micromechanical system for detecting an acceleration ,(2010)
Eric M. Hildebrant, Anthony S. Kourepenis, Ralph E. Hopkins, Paul A. Ward, Lance C. Niles, Steven T. Cho, Marc S. Weinberg, Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors ,(1997)
Mitsuhiro Yoda, Physical quantity sensor and electronic apparatus ,(2012)
Mark H. Eskridge, David L. Malametz, Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping ,(2003)
Aiwu Yue, Ronald B. Leonardson, MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement Journal of the Acoustical Society of America. ,vol. 117, pp. 3350- 3350 ,(2003) , 10.1121/1.1948234
Yizhen Lin, Todd F. Miller, Andrew C. Mcneil, Differential capacitive sensor and method of making same ,(2007)
Shigeki Tsuchitani, Hiromichi Ebine, Masahiro Kurita, Masahiro Matsumoto, Masayuki Miki, Akira Koide, Susumu Murakami, Seiko Suzuki, Satoshi Shimada, Electrostatic type micro transducer and control system using the same ,(1992)