Translating z axis accelerometer
作者： Joseph Seeger , Matthew Julian Thompson
DOI:
关键词: Mems sensors 、 Substrate (printing) 、 Cartesian coordinate system 、 Proof mass 、 Acoustics 、 Structural engineering 、 Accelerometer 、 Engineering
摘要: A system and method for providing a MEMS sensor are disclosed. In first aspect, the is that comprises substrate, an anchor region coupled to at least one support arm region, two guiding arms moving relative arm, plurality of sensing elements disposed on measure motion proof mass comprising each by set springs. The outside arms, springs, elements.
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