Accelerator sensor structure and use thereof
作者： Ville Pekka Rytkönen , Anssi Blomqvist , Leif Roschier
DOI:
关键词:
摘要: A MEMS-sensor structure comprising first means and second coupled for double differential detection positioned symmetrically to provide quantities the in a phase shift. If sensor deforms, due specifically symmetric positioning of means, effect displacement is at least partly eliminated.
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