A microelectromechanical capacitive sensor structure and device
作者： Liukku Matti , Ruohio Jaakko , Vesterinen Hannu
DOI:
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摘要: A MEMS structure that provides an improved way to selectively control electromechanical properties of a device with applied voltage. The includes capacitor element comprises at least one stator (6, 1), and rotor (8, 3) suspended for motion parallel first direction in relation the element. form element, capacitance which varies according displacement from initial position. are mutually oriented such range displacements position, second derivative respect has negative values.
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