Micromechanical system for detecting an acceleration
作者： Johannes Classen
DOI:
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摘要: A micromechanical system for detecting an acceleration includes a substrate, rocker-like mass structure having first lever arm and diametrically opposed second arm, the arms being situated tiltably at distance to substrate about axis of rotation electrodes provided on substrate. Each electrode is each section extending from which located between above intermediate space. The two sections have different masses.
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