作者: Kyung Hyun Park
DOI:
关键词: Active layer 、 Laser 、 Layer (electronics) 、 Diffraction grating 、 Materials science 、 Waveguide 、 Optics 、 Substrate (electronics) 、 Etching (microfabrication) 、 Terahertz radiation
摘要: A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers manufactured in one substrate, includes forming lower clad layer on the an active layer, upper layer. And interposing first and second diffraction grating layers between layers. is by etching The integrated into passive waveguide. An electrode formed