Method of manufacturing frequency tunable terahertz transceiver

作者: Kyung Hyun Park

DOI:

关键词: Active layerLaserLayer (electronics)Diffraction gratingMaterials scienceWaveguideOpticsSubstrate (electronics)Etching (microfabrication)Terahertz radiation

摘要: A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers manufactured in one substrate, includes forming lower clad layer on the an active layer, upper layer. And interposing first and second diffraction grating layers between layers. is by etching The integrated into passive waveguide. An electrode formed

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