Defect alarm system and method
作者： Gi-Gin Lin , Wei-Ming Chen , Chien-Yi Hsu
DOI:
关键词: Event (computing) 、 Pattern recognition 、 Chart 、 Engineering 、 Time frame 、 ALARM 、 Artificial intelligence 、 Reliability engineering 、 Data analysis system
摘要: To rapidly respond to successive abnormal defect events, a alarm system and method comprises counting the detection data from scan station using analysis producing trend chart for data. A analyzes at constant time frame records events produce report, an email automatically sends out report notice responsible engineer timely. After receiving notice, compares received distribution map with those of known in pattern database judge if event is one propose policy.
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Kyoko Asahina, Yoko Miyazaki, Kaoru Yamana, Inspection analyzing apparatus and semiconductor device ,(2001)