Integrated defect yield management and query system

摘要: An integrated defect yield management and query system for a semiconductor wafer fabrication process is disclosed. A local area network connects various testing devices conditions of wafers, server client device. After inspection, these generate plurality records corresponding to each the wafers. The retrieves through network. These are stored in database divided into fields, wherein field corresponds specific property Therefore, acquired on-line data their related history can be accessed by using an inquiring interface, device effectively poll server.