Deposition of rock salt AlN coatings by magnetron sputtering
作者： R. K. Choudhary , P. Mishra , R. C. Hubli
DOI: 10.1179/1743294414Y.0000000275
关键词: Metallurgy 、 Aluminium nitride 、 Paint adhesion testing 、 Microstructure 、 Sputter deposition 、 Scanning electron microscope 、 Thermal diffusivity 、 Sputtering 、 Materials science 、 Coating
摘要: Cubic aluminium nitride (AlN) coatings were successfully deposited on stainless steel 304L substrates by balanced magnetron sputtering. Grazing incidence X-ray diffraction measurement confirmed the formation of rock salt cubic AlN having a preferred orientation along (111) plane. Scanning electron microscopy revealed nodular microstructure coating. Thermal diffusivity coated sample was found to be significantly higher than that uncoated sample. Microscratch adhesion test showed no adhesive failure below 20 N loads.
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