Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors
作者： Fakhra Aziz , M Hassan Sayyad , Khassan S Karimov , M Saleem , Zubair Ahmad
DOI: 10.1088/1674-4926/31/11/114002
关键词: Organic semiconductor 、 Electronic engineering 、 Capacitance 、 Materials science 、 Optoelectronics 、 Capacitive sensing 、 Humidity 、 Fabrication 、 Thin film 、 Hygrometer 、 Phthalocyanine
摘要: This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine (VOPc) as active material. The devices, which comprise three different thicknesses, have been fabricated thermal evaporation technique. A thin film VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes. effect samples under has investigated. Comparison thicknesses shows that thinnest device seems more sensitive towards humidity. dependent capacitance properties sensor make it beneficial for use in commercial hygrometers.
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